Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2006-04-18
2006-04-18
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S212100, C310S309000
Reexamination Certificate
active
07031040
ABSTRACT:
An optical scanning apparatus includes a vibration mirror having a mirror surface that reflects an optical beam. A pair of torsion beams swingably support the mirror. The mirror is vibrated in a sealed space whose pressure is adjusted such that a characteristic of the mirror falls within a predetermined range.
REFERENCES:
patent: 5543956 (1996-08-01), Nakagawa et al.
patent: 5959760 (1999-09-01), Yamada et al.
patent: 6198565 (2001-03-01), Iseki et al.
patent: 6331052 (2001-12-01), Murai et al.
patent: 6352333 (2002-03-01), Matsumoto et al.
patent: 6485126 (2002-11-01), Kato et al.
patent: 6657765 (2003-12-01), Hayashi et al.
patent: 6682185 (2004-01-01), Hashimoto et al.
patent: 7-92409 (1995-04-01), None
patent: 9-197334 (1997-07-01), None
patent: 2924200 (1999-05-01), None
patent: 2981600 (1999-09-01), None
patent: 3011144 (1999-12-01), None
patent: 2001-228428 (2001-08-01), None
patent: 2002-40353 (2002-02-01), None
patent: 2002-40355 (2002-02-01), None
patent: 2002-228965 (2002-08-01), None
patent: 2002-267995 (2002-09-01), None
patent: 2002-277809 (2002-09-01), None
patent: 2002-321195 (2002-11-01), None
K. E. Petersen, Journal of Research and Development, vol. 24, No. 5, pp. 631-637, “Silicon Torsional Scanning Mirror”, Sep. 1980.
H. Schenk, et al., The 13thAnnual International Conference on MEMS 2000, pp. 473-478, “An Electrostatically Excited 2D-Micro-Scanning-Mirror With an In-Plane Configuration of the Driving Electrodes”, Jan. 23-27, 2000.
H. Camon, et al., The 13thAnnual International Conference on MEMS 2000, pp. 645-650, “Fabrication, Simulation and Experiment of a Rotating Electrostatic Silicon Mirror With Large Angular Deflection”, Jan. 23-27, 2000.
Fujii Mitsumi
Mochizuki Eiji
Cherry Euncha P.
Khatri Pranav
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Ricoh & Company, Ltd.
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