Optical scanner and laser image projector using the same

Details Optical scanner and laser image projector using the same Optical scanner and laser image projector using the same

2008-05-06

2008-05-06

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S212100

Reexamination Certificate

active

11147344

ABSTRACT:
Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.

REFERENCES:
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patent: 6681063 (2004-01-01), Kane et al.
patent: 6744173 (2004-06-01), Behin et al.
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patent: 2003/0011751 (2003-01-01), Sakata et al.
patent: 2003/0227538 (2003-12-01), Fujii et al.

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