Optical sample characterization system

Details Optical sample characterization system Optical sample characterization system

2005-11-30

2008-10-21

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07440094

ABSTRACT:
Systems and techniques for characterizing samples using optical techniques. Coherent light may be incident on a sample, and a diffraction pattern detected. Information indicative of diffraction pattern intensity may be used to determine one or more sample characteristics and/or one or more pattern characteristics. For example, sample characteristics such as stress, warpage, curvature, and contamination may be determined. The coherent light may be light of a single wavelength, or may be light of multiple wavelengths.

REFERENCES:
patent: 3879131 (1975-04-01), Cuthbert et al.
patent: 3964830 (1976-06-01), Ikeda et al.
patent: 4291990 (1981-09-01), Takasu
patent: 5264912 (1993-11-01), Vaught et al.
patent: 6137570 (2000-10-01), Chung et al.
patent: 6512578 (2003-01-01), Komatsu et al.
patent: 2002/0122174 (2002-09-01), Hamamatsu et al.
patent: 2002/0140930 (2002-10-01), Lin et al.
patent: 2004/0233439 (2004-11-01), Mieher et al.
patent: WO 00/00817 (2000-01-01), None

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