Optical resonance accelerometer

Details Optical resonance accelerometer Optical resonance accelerometer

1991-04-11

1993-06-08

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 73514, G01B 902

Patent

active

052184200

ABSTRACT:
An accelerometer includes a mass, a spring diaphragm, a collimating lens, and an optical interferometer formed between the mass and collimating lens. The mass and spring diaphragm are preferably formed from stainless steel, but the spring diaphragm may be formed from silicon and the mass from amorphous quartz. The interferometer exists between a mirrored surface of the mass, and a partially reflective surface of the collimating lens.

REFERENCES:
patent: 3635562 (1972-01-01), Catherin
patent: 4345124 (1982-08-01), Abbin, Jr. et al.
patent: 4372520 (1983-02-01), Shutt
patent: 4452533 (1984-06-01), Miles et al.
patent: 4572669 (1986-02-01), James et al.
patent: 4665747 (1987-05-01), Muscatell
patent: 4825262 (1989-04-01), Mallinson
patent: 4900918 (1990-02-01), Killian
Sensor Technology, Nov. 1989, pp. 2-3.
"A Miniature Fabry-Perot Inerferometer Fabricated Using Silicon Micromachining Techniques", Jerman et al., IEEE TH0215-4/88/000-0016, IEEE 1988.

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