Optical reflector, illumination optical system, light source sys

Details Optical reflector, illumination optical system, light source sys Optical reflector, illumination optical system, light source sys

1994-10-27

1997-06-17

Dzierzynski, Paul M.

Optical: systems and elements

Mirror

With mirror surface of varied radius

359867, 359868, 359365, 359389, 359482, 362268, 362291, 362347, G02B 510, G02B 2702, G02B 1700, G02B 2106

Patent

active

056402848

ABSTRACT:
An optical illumination system according to the present invention is provided with an optical reflector for illuminating a surface to be illuminated in the shape of arc or annulus. A reflective plane of the optical reflector is shaped in a special curved surface. Specifically, an arbitrary parabola with a first axis passing through the vertex and the focus of the parabola is rotated about a second axis passing through a point located on the opposite side of the directrix of the parabola with respect to the focus and being parallel to the directrix. The rotation of the parabola yields a parabolic toric surface. The reflective plane of the optical reflector has the curved surface constituting at least a part of the parabolic toric surface. The reflective plane so shaped reflects a light source image emitted from a light source system to illuminate the surface to be illuminated in the shape of arc or annulus.

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patent: 5220449 (1993-06-01), Kuroda
patent: 5233457 (1993-08-01), Hamada et al.
patent: 5255116 (1993-10-01), Araki et al.
N. Shiraishi et al. "New Imaging Technique for 64M-DRAM", SPIE vol. 1647 Optical/Laser Microlithography (Mar. 11-13, 1992).

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