Optical reflector element, its method of fabrication, and an...

Radiant energy – Radiation controlling means

Reexamination Certificate

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C378S145000

Reexamination Certificate

active

07321127

ABSTRACT:
The invention provides an optical reflector element (1) for a beam of X-rays (RX) or of gamma-rays or of high-energy particles at grazing incidence, the element being constituted by a stack of superposed silicon plates (10-12). Each plate (10-12) has a reflecting top face (101-121) possibly coated with a metallic film, a multilayer or a dispersive grating and a bottom face carrying ribs (100-120) forming spacers between two successive plates (10-11, 11-12), and defining determined spacing between two successive reflecting faces (101-121). The invention also provides optical instruments comprising several such elements, in particular a type I Wolter telescope comprising two mirrors in tandem having respective paraboloid and hyperboloid surfaces of revolution or a conical approximation thereof or a Kirkpatrick-Beaz system.

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patent: 5016267 (1991-05-01), Wilkins
patent: 5982562 (1999-11-01), Rode
patent: 6048070 (2000-04-01), LaFiandra
patent: 6363136 (2002-03-01), Flisikowski et al.
patent: 1 085 528 (2001-03-01), None
Preliminary Search Report.
M.K. Joy, et al., “The Imaging Properties of a Silicon Wafer X-Ray Telescope,” SPIE, 1994, pp. 283-286, vol. 2279, The International Society for Optical Engineering, Bellingham, WA.
Paul Kirkpatrick, et al., “Formation of Optical Images by X-Rays,” Journal of the Optical Society of American, Sep. 1948, pp. 766-774, vol. 28, No. 9, Optical Society of America, Washington D.C.
R.C. Woodbury, et al., “Curved Silicon Substrates for Multilayer Structures,” SPIE, 1986, pp. 69-75, vol. 691, The International Society of Optical Engineering, Bellingham, WA.
Larry V. Knight, “The Investigation of Multilayer X-Ray Reflectors as X-Ray Optical Elements,” Final Report to the U.S. Department of Energy San Francisco operations Office, DOE/DP/10741-1, Dec. 15, 1989, pp. 1-52, Brigham Young University Department of Physics, Provo, Utah.
M.W. Beijersbergen, et al., High-Resolution Micro-Pore X-Ray Optics Produced with Micro-Channel Plate Technology, SPIE, 2001, pp. 188-192, vol. 4145. The International Society for Optical Engineering, Bellingham, WA.

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