Optics: measuring and testing – Plural test
Reexamination Certificate
2005-08-09
2010-02-23
Evans, F. L (Department: 2877)
Optics: measuring and testing
Plural test
C356S124000, C356S364000
Reexamination Certificate
active
07667829
ABSTRACT:
An optical property measurement apparatus is equipped with an optical system unit that selectively places an opening section for passing illumination light, a microlens array for measuring wavefront aberration, and a polarization detection system for measuring a polarization state of the illumination light on an optical path of the illumination light. Accordingly an illumination shape and a size of an illumination optical system, wavefront aberration of a projection optical system and a polarization state of the illumination light can be measured together. Therefore, for example, even when exposure is performed with polarized illumination that is a type of modified illumination, highly-accurate exposure can be achieved by adjusting various optical systems based on the measurement results.
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Fujii Toru
Kaise Koji
Mizuno Yasushi
Evans F. L
Nikon Corporation
Oliff & Berridg,e PLC
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