Optical properties restoration apparatus, the restoration...

Details Optical properties restoration apparatus, the restoration... Optical properties restoration apparatus, the restoration...

2007-03-06

2010-10-12

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

C359S580000

Reexamination Certificate

active

07813036

ABSTRACT:
An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is exposed to the plasma.

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