Optical: systems and elements – Miscellaneous
Reexamination Certificate
2007-03-06
2008-10-21
Pritchett, Joshua L (Department: 2872)
Optical: systems and elements
Miscellaneous
Reexamination Certificate
active
07440206
ABSTRACT:
An optical properties restoration apparatus improves reliability and longevity of optical properties of an optical system, lying upon a vacuum boundary, by preventing, suppressing, or improving degradation of optical properties. The apparatus includes creating the near vacuum zone to excite an oxidation reaction of carbon, generating a flow of an oxygen atom-containing gas such as water gas or oxide gas in the near vacuum zone, and supplying active energy in the near vacuum zone to cause a carbon oxidation reaction between the oxygen atom-containing gas and the carbon. The near vacuum zone faces the lighting surfaces of the optical system and a lower limit value for a partial pressure of the gases containing oxygen atoms that is supplied to the near vacuum zone is set to a level over a speed of the carbon buildup that deposits on the lighting surfaces of the optical system.
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Danno Minoru
Futami Hiroshi
Kuribayashi Shizuma
Sakai Satoshi
Tsuruga Shigenori
Birch & Stewart Kolasch & Birch, LLP
Mitsubishi Heavy Industries Ltd.
Pritchett Joshua L
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