Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1980-02-26
1981-10-20
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
355 63, 355 66, G03B 2752, G03B 2770
Patent
active
042957354
ABSTRACT:
An optical system for projecting patterns in order to reproduce the image of at least one modulating object on a mask or semiconductor wafer coated with photosensitive material for the fabrication of semiconductor components. In this system, optical reflecting means comprising one or a number of plane mirrors including at least one movable mirror are introduced in the optical path of the imaging objective. By forming additional optical paths, it is thus possible to associate with a photorepetition function different functions such as photocomposition or other photorepetition paths, or else to associate a device for ensuring alignment of the object-image planes and comprising optoelectronic detection means.
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Gerard Andre
Lacombat Michel
"Thomson-CSF"
Wintercorn Richard A.
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