Optical projection apparatus with the function of controlling la

Details Optical projection apparatus with the function of controlling la Optical projection apparatus with the function of controlling la

1989-03-29

1991-04-09

Cuchlinski, Jr., William A.

Optics: image projectors

Miscellaneous

353 82, 350169, 350172, G03B 2114, G02B 2710

Patent

active

050059696

ABSTRACT:
Disclosed is an optical projection apparatus with the function of controlling laser coherency which comprises a laser source, a splitting device for splitting light emitted from the laser source into a plural incoherent split light beams having light intensity equal to each other, an illumination optical system for focusing each of the split light beams, and a projection optical system for projecting an image of a pattern of a mask illuminated with the split light beams from the illumination optical system onto a sample.

REFERENCES:
patent: 3485552 (1969-12-01), Adler
patent: 3879109 (1975-04-01), Thomas
patent: 4093964 (1978-06-01), Aughton
patent: 4367009 (1983-01-01), Suzki
patent: 4397525 (1983-08-01), Ahlen
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4765715 (1983-08-01), Matsudaira et al.
patent: 4841341 (1989-06-01), Ogawa et al.

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