Optical projection aligner equipped with rotatable fly-eye lens

Details Optical projection aligner equipped with rotatable fly-eye lens Optical projection aligner equipped with rotatable fly-eye lens

1995-01-31

1997-06-03

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 55, 355 67, 250548, G03B 2772, G03B 2754, H01L 2130

Patent

active

056360053

ABSTRACT:
A projection aligner is equipped with a diaphragm having four sectoral openings arranged in symmetry with respect to orthogonal symmetrical lines respectively aligned with two orthogonal directions of a reticle pattern, and a rotating system is provided for a fly-eye lens so as to align two orthogonal symmetrical lines of the fly-eye lens with the two orthogonal symmetrical lines of the diaphragm, thereby improving a resolution of the reticle pattern on a photo-resist layer.

REFERENCES:
patent: 4577959 (1986-03-01), Yazaki
patent: 5383000 (1995-01-01), Michaloski et al.

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