Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1997-07-16
1999-09-14
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
G01B 1124
Patent
active
059531266
ABSTRACT:
A scanning reflection profilometry system utilizes an objective lens which focuses a beam at the surface under test and measures the profile of the surface (its height variations) in accordance with the amount of defocus of the reflected beam. Surface profile distortion which is focus dependent is reduced through the use of a transparent mask over the aperture of the lens in the path of the beam which is incident on and reflected from the surface under test and which covers a portion but not all of the aperture. A photodetector upon which the reflected beam is incident provides output signals representing the change in profile. The system has height sensitivity characteristic of a small spot size on the surface without signal distortion attributable to the diffraction anomalies associated with small spot sizes. A microprofilometer head having the objective lens and other optics is mounted on flexures and driven to execute reciprocal movement so as to scan the surface under test.
REFERENCES:
patent: 3715165 (1973-02-01), Smith
patent: 3807029 (1974-04-01), Troeger
patent: 4355904 (1982-10-01), Balasubramanian
patent: 4359282 (1982-11-01), Garrison
patent: 4579454 (1986-04-01), Kleinknecht
patent: 4629324 (1986-12-01), Stern
patent: 4732485 (1988-03-01), Morita et al.
patent: 4748335 (1988-05-01), Lindow et al.
patent: 4798469 (1989-01-01), Burke
patent: 4806777 (1989-02-01), Ulbers et al.
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 4965441 (1990-10-01), Picard
patent: 5270560 (1993-12-01), Cheng
Philips International, Compact Disc Technology, 1991.
Compact Disc Digital Audio, Customers Specifications CDM-9, Revision 1.0, Oct. 29, 1991.
Evans F. L.
Lucid Inc
LandOfFree
Optical profilometry does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical profilometry, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical profilometry will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1515300