Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1997-01-06
1999-09-21
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
059556617
ABSTRACT:
An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.
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Kuhn William P.
McWaid Thomas
Parks Robert E.
Samsavar Amin
Weber Michael
Kla-Tencor Corporation
Larkin Daniel S.
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