Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1989-03-17
1991-08-27
Turner, Samuel
Optics: measuring and testing
By particle light scattering
With photocell detection
356359, 356361, 356376, 356382, G01B 902
Patent
active
050429493
ABSTRACT:
An optical non-contact surface profiler for determining (i) the surface profile of a transparent layer on a light-absorbing or opaque substrate, (ii) the surface profile of a light-absorbing or opaque substrate through a transparent layer, and (iii) the thickness profile of a transparent layer on a light-absorbing or opaque surface. A microscope alternatively configured in interferometric mode and in spectrophotometric mode provides phase data from an interference pattern and reflectance data from a reflectance pattern, respectively. A photo-sensing device receives the interference patterns and reflectance patterns and inputs the corresponding phase data and reflectance data to a computing device. The computing device processes the data to determine the appropriate surface or film thickness profiles.
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Young James M.
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