Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-07-18
2006-07-18
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S028500, C356S498000
Reexamination Certificate
active
07079260
ABSTRACT:
An optical profile determining apparatus includes an optical detector and an optical source. The optical source generates a transmit beam including a plurality of wavelengths, and generates a reference beam including the plurality of wavelengths. Optical elements direct the transmit beam to a target, direct a resulting reflected transmit beam back from the target to the optical detector, and combine the reference beam with the reflected transmit beam so that a profile of the target is based upon fringe contrast produced by the plurality of wavelengths in the reference beam and the plurality of wavelengths in the reflected transmit beam.
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Allen Dyer Doppelt Milbrath & Gilchrist, P.A.
Connolly Patrick J.
Harris Corporation
Toatley , Jr. Gregory J.
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