Optical processing apparatus

Details Optical processing apparatus Optical processing apparatus

1992-05-27

1994-10-11

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, 346108, G02B 1700

Patent

active

053551940

ABSTRACT:
An optical processing apparatus utilizing multiple reflections of a light beam between a mask and a reflector has improved uniformity in the distribution of the light beam over a surface of the mask. In one form, the reflector is disposed in a face-to-face relation with respect to the mask with an angle of inclination relative thereto. In another form, the reflector has a flat or curved taper surface for decreasing an angle of reflection of the light beam at the mask surface at an initial stage, and a flat surface disposed in parallel with the mask surface. In a further form, the reflector is curved in a direction of transmission of the light beam. In a yet further form, an angle of incidence of the light beam is properly adjusted such that a portion of the light beam, which is first reflected from the mask and escapes outwardly from the reflector, is minimized.

REFERENCES:
patent: 5040882 (1991-08-01), Markle
Direct Letterpress Platemaking by XeF Excimer Laser pp. 563(39)-567(43) of Magasin "Optics" vol. 11, No. 6.
Metal Film Removal and Patterning Using a XeC1 Laser Appln. Phys. Lett 43 (11) Dec. 1983.

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