Optical process for determining the endpoint of a process via an

Details Optical process for determining the endpoint of a process via an Optical process for determining the endpoint of a process via an

1986-10-27

1988-01-19

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

356224, G01J 142

Patent

active

047206284

ABSTRACT:
An improved optical endpoint detector is disclosed in which two photocells are used in conjunction with analog multipliers and variable voltage sources, all under microprocessor control. The combination enables one to measure the ratio of intensity of different emission lines, as well as their individual outputs and alternative process monitoring signals.

REFERENCES:
patent: 3664752 (1972-05-01), Hermieu
patent: 3687558 (1972-08-01), Rex
patent: 4320289 (1982-03-01), White et al.
patent: 4465370 (1984-08-01), Yuasa et al.

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