Optical probing method and apparatus

Details Optical probing method and apparatus Optical probing method and apparatus

1990-10-18

1992-06-30

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 72, 324 77K, 324 96, G01R 2300, G01R 2316

Patent

active

051266610

ABSTRACT:
An integrated circuit (11) is tested at a high microwave frequency through the use of a laser beam (19) having a repetition rate much lower than the test frequency. Electric fields of the test signal extend into an electro-optic material (12) that modulates part of the laser beam. Another part of the laser beam is converted to an electrical pulsed signal that is applied to a microwave mixer (33) along with part of the test frequency signal. A harmonic of the pulsed signal mixes with the test frequency to yield a difference frequency that can be used as a phase reference for analyzing the phase of the test signal. The component pulses (30) of the laser beam have a pulse width which is much shorter than the separation of the pulses, which make it inherently rich in higher harmonics of the fundamental pulse repetition rate.

REFERENCES:
patent: 3614451 (1971-10-01), Gunn
patent: 4446425 (1984-05-01), Valdmanis et al.
patent: 4553099 (1985-11-01), Kasahara et al.
patent: 4618819 (1986-10-01), Mourou et al.
patent: 4681449 (1987-07-01), Bloom et al.
patent: 4737719 (1988-04-01), Moore
"100 GHz On-Wafer S-parameter Measurements by Electrooptic Sampling," by R. Majidi-Ahy et al., 1989 IEEE MTT-S Digest, pp. 299-301.
"Electro-optic Sampling Measurement of High-Speed InP Integrated Circuits," by J. M. Weisenfeld, et al., Applied Physics Letters, vol. 15, No. 19, May 11, 1987, pp. 1310-1312.
"Picosecond Optical Sampling of GaAs Integrated Circuits," by K. J. Weingarten et al., IEEE Journal of Quantum Electronics, vol. 24, No. 2, Feb. 1988, pp. 198-220.

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