Optical probe microscope having a fiber optic tip that receives

Details Optical probe microscope having a fiber optic tip that receives Optical probe microscope having a fiber optic tip that receives

1996-06-03

1997-12-02

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, H01J 314, H01J 3700

Patent

active

056939388

ABSTRACT:
An optical probe microscope includes an optical fiber oriented in a vertical direction. The fiber has a tip that emits light onto a horizontal surface of a sample to be measured. This surface can have both desired and undesired departures from planarity. An electromechanical device for imparting dither motion to the fiber tip is superposed on another electromechanical device for imparting two-dimensional horizontal scanning motion to the fiber tip. The dither motion has a much higher frequency than that of the scanning motion. Between successive scannings, another device moves the sample itself from one horizontal position to another. A microscope receives the optical radiation either transmitted or reflected by the sample surface. The microscope forms a (magnified) image of this received optical radiation on the surface of an optical image position detector. The surface of this detector has a relatively large area compared with that of the (magnified) image. The resulting electrical signal developed by the detector provides desired information concerning the scanning position of the fiber tip. Also, this electrical signal is processed and fed back to a vertical pusher that maintains desirably constant the distance of the fiber tip from the sample surface.

REFERENCES:
patent: 4758065 (1988-07-01), Dorman et al.
patent: 5081350 (1992-01-01), Iwasaki et al.
patent: 5196713 (1993-03-01), Marshall
patent: 5198715 (1993-03-01), Elings et al.
patent: 5254854 (1993-10-01), Betzig
patent: 5260569 (1993-11-01), Kimura
patent: 5418363 (1995-05-01), Elings et al.

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