Optical probe for wafer testing

Details Optical probe for wafer testing Optical probe for wafer testing

2006-03-28

2006-03-28

Font, Frank G. (Department: 2883)

Optical waveguides

With optical coupler

Input/output coupler

C385S035000, C385S050000, C385S129000, C385S141000, C362S511000

Reexamination Certificate

active

07020363

ABSTRACT:
A first optical probe is used to test a planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.

REFERENCES:
patent: 6687010 (2004-02-01), Horii et al.
patent: 2003/0123793 (2003-07-01), Johannessen

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