Optical pressure transducer

Details Optical pressure transducer Optical pressure transducer

1990-10-15

1992-04-07

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73705, 73708, 73778, 7386259, 25023119, G01L 708, G01L 1100

Patent

active

051016648

ABSTRACT:
A micromachined silicon pressure transducer employs a vibrating bridge that is formed from the same silicon slab as the pressure responsive diaphragm. The resonant frequency of the bridge is a temperature insensitive representation of the pressure.

REFERENCES:
patent: 4229979 (1980-10-01), Greenwood
patent: 4813271 (1989-03-01), Greenwood
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 4930042 (1990-05-01), Wiegond et al.
patent: 5009108 (1991-04-01), Harada et al.
App. Phys. Lett. 38, 15 Jun. 1981, "Laser Chemical Technique for Rapid Direct Writing of Surface Relief in Silicon", Ehrlich et al.
Electronics Letters, vol. 23, No. 25, Dec. 3, 1987, "Optically Excited Resonant Beam Pressure Sensor".
Electronics Letters, vol. 24, No. 10, May 12, 1988, "Novel Optically Excited Resonant Pressure Sensor".
UV Laser Surface Interactions, "Interaction of Deep-Ultraviolet Laser Light with GaAs Surfaces in Aqueous Solutions", Podlesnik et al., 1986.

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