Optical pressure sensor

Details Optical pressure sensor Optical pressure sensor

2006-02-21

2006-02-21

Lee, Hwa (Andrew) (Department: 2877)

Measuring and testing

Fluid pressure gauge

Vibration type

C073S862590

Reexamination Certificate

active

07000477

ABSTRACT:
A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.

REFERENCES:
patent: 4163953 (1979-08-01), Springthorpe et al.
patent: 6546804 (2003-04-01), Stemme et al.

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