Optical pressure sensor

Details Optical pressure sensor Optical pressure sensor

2005-05-17

2005-05-17

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By light interference

Using fiber or waveguide interferometer

Reexamination Certificate

active

06894787

ABSTRACT:
A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.

REFERENCES:
patent: 4773972 (1988-09-01), Mikkor
patent: 4884450 (1989-12-01), Greenwood et al.
patent: 5060526 (1991-10-01), Barth et al.
patent: 5559358 (1996-09-01), Burns et al.
patent: 5808210 (1998-09-01), Herb et al.
patent: 6031944 (2000-02-01), Youngner
patent: 6182513 (2001-02-01), Stemme et al.
patent: 6227055 (2001-05-01), Pitzer
patent: 6246638 (2001-06-01), Zook et al.
patent: 6324897 (2001-12-01), Schrenk et al.

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