Optical position measuring system using an interference pattern

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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Reexamination Certificate

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07009713

ABSTRACT:
A position measuring system including a laser light source for radiating a laser beam, an optical lens system for generating an interference pattern on the basis of the laser beam having passed through different optical paths, a detector for detecting the interference pattern, and an arithmetic unit for calculating the position of at least one of the light source and the detector on the basis of a detection signal issued from the detector. For example, a spherical lens can be used as the optical lens system. In this case, the interference pattern is formed on the basis of spherical aberration of the lens. Alternatively, a multifocal lens may be used as the optical lens system.

REFERENCES:
patent: 4627722 (1986-12-01), Falk et al.
patent: 5699158 (1997-12-01), Negishi
patent: 6100538 (2000-08-01), Ogawa
patent: 6714311 (2004-03-01), Hashimoto
patent: B2 4-8724 (1992-02-01), None

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