Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-03-07
2006-03-07
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07009713
ABSTRACT:
A position measuring system including a laser light source for radiating a laser beam, an optical lens system for generating an interference pattern on the basis of the laser beam having passed through different optical paths, a detector for detecting the interference pattern, and an arithmetic unit for calculating the position of at least one of the light source and the detector on the basis of a detection signal issued from the detector. For example, a spherical lens can be used as the optical lens system. In this case, the interference pattern is formed on the basis of spherical aberration of the lens. Alternatively, a multifocal lens may be used as the optical lens system.
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Hotta Hiroyuki
Seko Yasuji
Chisdes Sarah J.
Fuji 'Xerox Co., Ltd.
Oliff & Berridg,e PLC
Toatley , Jr. Gregory J.
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