Optical position measuring system and method using a low...

Details Optical position measuring system and method using a low... Optical position measuring system and method using a low...

2003-11-17

2009-08-11

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S401000, C356S620000, C356S622000

Reexamination Certificate

active

07573580

ABSTRACT:
An optical position measuring system (e.g., an interferometer) includes a superluminescent device (SLD) (e.g., a laser diode having at least one anti-reflective coated surface) and a detector. The SLD generates a light beam having a short coherence length (e.g., about 0.1 mm to about 0.5 mm, less than the optical path length of an optical element, and/or less than a spacing between optical elements). Through use of the short coherence length light beam, interference effects from spurious or ghost reflections that exist in conventional position measuring systems are substantially reduced or eliminated.

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