Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1988-12-23
1990-11-20
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
356 1, G01B 1114
Patent
active
049714430
ABSTRACT:
A method of and an apparatus for optically detecting the position of an object having a surface including first and second reflecting regions each having a different reflectance coefficient. First a ratio of reflectance of the first reflecting region to that of the second reflecting region is obtained. Incident optical beams are projected onto the measured surface of the object, and first and second reflected optical beams reflected by the first and second reflecting regions of the measured surface are received at a photoelectric conversion element to obtain first and second light receiving signals, respectively. Thereafter, the second light receiving signal is multiplied by the reflectance ratio to produce a correction light receiving signal. Further, the central position of the reflected optical beams is obtained on the basis of the first light receiving signal and the correction light receiving signal. Thus, the central position of the reflected optical beams can be obtained with very high accuracy.
REFERENCES:
patent: 3759615 (1973-09-01), Loewe
patent: 4575237 (1986-03-01), Suzuki
patent: 4589773 (1986-05-01), Ido et al.
Dainippon Screen Mfg. Co,. Ltd.
Hantis K. P.
Rosenberger Richard A.
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