Optical polishing formulation

Details Optical polishing formulation Optical polishing formulation

1998-02-18

1999-11-23

Marcheschi, Michael

Abrasive tool making process, material, or composition

With inorganic material

Metal or metal oxide

106 3, C09G 102

Patent

active

059893010

ABSTRACT:
An optical polishing slurry with alumina and ceria components is found to produce an improved polishing performance over either component used alone.

REFERENCES:
patent: 3429080 (1969-02-01), Lachapelle
patent: 4106915 (1978-08-01), Kagawa et al.
patent: 4576612 (1986-03-01), Shukla et al.
patent: 4601755 (1986-07-01), Melard et al.
patent: 5632668 (1997-05-01), Lindholm et al.
patent: 5693239 (1997-12-01), Wang et al.
patent: 5697992 (1997-12-01), Ueda et al.
patent: 5804513 (1998-09-01), Sakatani et al.

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