Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1998-05-20
2000-03-21
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
G01B 1124
Patent
active
06040910&
ABSTRACT:
The present invention is an optical system for profiling a surface of an object. The optical system includes a projection system for directing an incident beam of light having a varying intensity pattern onto the surface of the object. The projection system includes a filter or the like for reducing or attenuating high order harmonics from the varying intensity pattern. The varying intensity pattern of the incident light beam is spatially shifted N times, where N is greater than 2. A detector array is arranged relative to the surface of the object to receive a reflected deformed grating image of the surface. A processing system, coupled to the detector array, determines a surface profile of the object based on a number of the deformed grating image at different spatial phases.
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Lu Guowen
Wu Shudong
Monahan Thomas J.
Rosenberger Richard A.
The Penn State Research Foundation
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