Optical pellicle with controlled transmission peaks and anti-ref

Details Optical pellicle with controlled transmission peaks and anti-ref Optical pellicle with controlled transmission peaks and anti-ref

1995-09-06

1998-04-21

Le, H. Thi

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

359586, 359589, 428192, 428336, 428337, 428421, 428532, 428913, B32B 702, G02B 110

Patent

active

057415765

ABSTRACT:
An optical pellicle and method of forming an optical pellicle. The pellicle includes a membrane and an anti-reflective coating covering at least one of the membrane surfaces. The membrane has a wavelength transmission pattern with consecutive first and second maximum transmission peaks where the first maximum transmssion peak corresponds to a wavelength of 365 nm and the second maximum transmission peak corresponds to a wavelength of 436 nm. The pellicle transits at least 99 percent of light striking said pellicle having a wavelength of about 361 nm to 369 nm and at least 99 percent of light striking said pellicle having a wavelength of about 430 nm to 442 nm. In one embodiment, the anti-reflective coating includes at least one intermediate layer having a refractive index less than the refractive index of the membrane, and an outer layer having a refractive index less than the refractive index of the intermediate layer.

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R. Hershel, "Pellicle Protection of Integrated Circuit (IC) Masks," SPIE vol. 275 Semiconductor Microlithography VI (1981), pp. 23-28.

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