Optical pellicle and package

Details Optical pellicle and package Optical pellicle and package

1996-10-30

1998-10-13

Thomas, Alexander

Stock material or miscellaneous articles

Display in frame or transparent casing; or diorama including...

Peripheral enclosure or frame

430 5, G03F 900

Patent

active

058209506

ABSTRACT:
An optical pellicle and package are disclosed. The optical pellicle includes a pellicle membrane and a pellicle frame with a cover side, a membrane side and an outer edge. The pellicle membrane is mounted and covers a substantial portion of the membrane side of the pellicle frame. The membrane side of the pellicle frame includes a peripheral region that extends beyond the pellicle membrane. In one embodiment of the invention, the peripheral region includes a relieved portion at the periphery of the membrane side of the pellicle frame. Another embodiment includes one of the previously described optical pellicles and a package. The package includes a first piece and a second piece. The first piece includes a structure for supporting an optical pellicle. The structure is configured to support the optical pellicle so that the pellicle membrane is free from contact with the first piece of the package. The second piece of the package is configured to mate with the first piece, thereby enclosing the optical pellicle within the package. When enclosed within the package, the pellicle membrane is free from contact with the first and second pieces of the package. Finally, a method for assembling such a packaged pellicle is also disclosed.

REFERENCES:
patent: 4131363 (1978-12-01), Shea et al.
patent: 4470508 (1984-09-01), Yen
patent: 4511038 (1985-04-01), Miller et al.
patent: 4697701 (1987-10-01), Ying
patent: 5203961 (1993-04-01), Yen
patent: 5254375 (1993-10-01), Yen
patent: 5305878 (1994-04-01), Yen
patent: 5422704 (1995-06-01), Sego
Micro Lithography, Inc. Pellicle Packaging Photograph Nos. 1-10, Apr. 8, 1996.
Micro Lithography, Inc. Pellicle Packaging Photograph Nos. 11-17, Oct. 11, 1994.

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