Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor
Patent
1997-02-10
1998-06-23
Ball, Michael W.
Adhesive bonding and miscellaneous chemical manufacture
Methods
Surface bonding and/or assembly therefor
156108, 156267, 1562728, 428422, 430 5, G03F 114, H01L 21027
Patent
active
057699844
ABSTRACT:
One aspect of the invention comprises a method of assembling an optical pellicle including a pellicle frame and a pellicle membrane in which adhesive is first applied to the pellicle frame, and then solvent in the adhesive is permitted to evaporate. Solvent is then applied to the adhesive on the pellicle frame, and the pellicle membrane is mounted onto the adhesive on the pellicle frame. Normally the step in which solvent is permitted to evaporate involves baking the frame with the adhesive thereon at an elevated temperature. Also, it is normal that as soon as the solvent is applied to the adhesive on the pellicle frame, once the adhesive feels tacky, the pellicle membrane is mounted in place. An additional step to this process involves generation of heat in the pellicle membrane and the adhesive after the membrane is mounted to the adhesive on the pellicle frame, to further bond the membrane to the frame.
REFERENCES:
patent: 4470508 (1984-09-01), Yen
patent: 4737387 (1988-04-01), Yen
patent: 4759990 (1988-07-01), Yen
patent: 5168993 (1992-12-01), Yen
patent: 5203961 (1993-04-01), Yen
patent: 5254375 (1993-10-01), Yen
patent: 5271803 (1993-12-01), Yen
patent: 5300348 (1994-04-01), Kubota et al.
patent: 5305878 (1994-04-01), Yen
patent: 5314728 (1994-05-01), Yen
patent: 5332604 (1994-07-01), Yen
patent: 5339197 (1994-08-01), Yen
patent: 5453816 (1995-09-01), Wang
Bih Qoang Rung
Yen Yung-Tsai
Ball Michael W.
Micro Lithography, Inc.
Yao Sam Chuan
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