Optical pedestal and method for using the same

Details Optical pedestal and method for using the same Optical pedestal and method for using the same

1996-09-30

1998-05-05

Ben, Loha

Optical: systems and elements

Lens

With support

359385, 359475, 359599, 359894, 362 30, 362 31, 356 71, G02B 702

Patent

active

057483892

ABSTRACT:
An optical housing (30) includes an optical pedestal (10), a light-blocking mask (31), and a translucent light diffuser (32). The optical housing (30) is used to inspect a work piece (51) placed on a top surface (21) of the optical pedestal (10). Diffusive light is transmitted from the translucent light diffuser (32) into the optical pedestal (10) via a portion of an optically polished bottom surface (11) that is uncovered by the light-blocking mask (31). In the optical pedestal (10), light is reflected by an optically polished inclined surface (23) and refracted by another optically polished inclined surface (25). When light is transmitted away from the optical pedestal (10) after being refracted, it is a collinear light beam and substantially parallel to the top surface (21) of the optical pedestal (10).

REFERENCES:
patent: 5142274 (1992-08-01), Murphy et al.
patent: 5165772 (1992-11-01), Wu
patent: 5404277 (1995-04-01), Lindblad
patent: 5485318 (1996-01-01), Lebby et al.
patent: 5546888 (1996-08-01), Skiver et al.
patent: 5550715 (1996-08-01), Hawkins
patent: 5596402 (1997-01-01), Markantes et al.
patent: 5617251 (1997-04-01), Ohta et al.

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