Optical pattern projecting apparatus

Details Optical pattern projecting apparatus Optical pattern projecting apparatus

1993-12-10

1995-01-17

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2700

Patent

active

053829999

ABSTRACT:
An optical pattern projecting apparatus comprising a divergent mirror 16 for converting a light beam 13 from a light source 11 into a radially outwardly divergent light beam 13b and a convergent mirror 18 for converting the divergent light beam 13b into a radially inwardly convergent light beam 13d. The convergent light beam 13d is converted by a parallelizing mirror 17 into a parallel zonal ringed light beam 13e which is focused onto a surface of the work piece 15. A polarization beam splitter may be used for deflection-angular polarizing and splitting the light beam into an S-polarized light and a P-polarized light.

REFERENCES:
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 4851978 (1989-07-01), Ichihara
patent: 5300972 (1994-04-01), Kamon
patent: 5311249 (1994-05-01), Kamon et al.

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