Optical object measurement apparatus

Details Optical object measurement apparatus Optical object measurement apparatus

2011-07-05

2011-07-05

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07973940

ABSTRACT:
An optical object measurement apparatus includes a light source for generating a low-coherent light beam, which is swept via an array of pinholes on a Nipkow disk that rotates about an axis. A beam splitter splits the swept light beam into a probe light beam toward an object to be measured and a reference light beam toward a reference optical path. The probe light beam from the object and the reference light that has traveled along the reference optical path are combined in the beam splitter to produce interference light. A two-dimensional image-capturing device detects the interference light and produces a video signal to provide reflection intensity information of the interior of the object. This allows an interference optical system to be readily realized and tomographic images of an object to be observed at high levels of resolution and contrast.

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