Optical navigation device, and method for manufacturing same

Details Optical navigation device, and method for manufacturing same Optical navigation device, and method for manufacturing same

2007-07-24

2007-07-24

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S214100, C250S208100, C345S163000, C345S166000

Reexamination Certificate

active

11314617

ABSTRACT:
An optical navigation sensor receives light that is produced by a light source and reflected from a surface. The optical navigation sensor has a silicon substrate having a plurality of photo-sensing regions, each of which receives a portion of the reflected light, and each of which provides a pixel of navigation information. At least one layer of material is deposited on the photo-sensing regions of the silicon substrate during a silicon wafer fabrication process. Each layer has a thickness that causes it to serve as an anti-reflection coating and reduce a percentage of light that is reflected away from the photo-sensing regions of the silicon substrate. A circuit biases each of the photo-sensing regions with a current, the current providing a given responsivity, and the current being less than a current that would be required to provide the given responsivity absent the at least one layer of material.

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Espinasse et al.; “Detection Reflections”; SPIE's oemagazine, Mar. 2004; pp. 24-26.

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