Optical multiwavelength window contamination monitor for...

Optics: measuring and testing – Inspection of flaws or impurities

Reexamination Certificate

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C356S239700

Reexamination Certificate

active

07948617

ABSTRACT:
A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side includes a radiation source to emit a radiation signal, a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window, a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal, and a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal.

REFERENCES:
patent: 4428673 (1984-01-01), Yoshida
patent: 5220400 (1993-06-01), Anderson et al.
patent: 5812270 (1998-09-01), Hampton et al.
patent: 6765206 (2004-07-01), Sugiyama et al.
patent: 2007/0263206 (2007-11-01), LeBlanc et al.
patent: 2008/0062422 (2008-03-01), Thomas et al.

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