Optical monitoring of thin films using fiber optics

Details Optical monitoring of thin films using fiber optics Optical monitoring of thin films using fiber optics

2008-03-18

2008-03-18

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

For light transmission or absorption

C356S445000, C356S369000

Reexamination Certificate

active

07345765

ABSTRACT:
An optical monitoring system for monitoring thin film deposition on a substrate includes a support bridge that is attached on an inside of a deposition chamber. The system further includes a fiber optic collimator having an optical fiber for incoming light, and another fiber optic collimator having an optical fiber for transmitted or reflected light from the substrate. The system further includes a shutter that is closed when a desired thin film thickness is deposited on the substrate.

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