Optical module & method for manufacturing the same

Details Optical module & method for manufacturing the same Optical module & method for manufacturing the same

1996-08-20

1998-08-11

Lee, John D.

Optical waveguides

With optical coupler

Particular coupling structure

385 51, 385 88, 228165, 228193, G02B 630

Patent

active

057939144

ABSTRACT:
An optical module and method in which an optical element (32) and an optical waveguide (34) are formed on a silicon substrate (31) so that an optical axis of the optical element coincides with an optical axis of the optical waveguide. Metallized films (41, 42) are formed on the silicon substrate and on the optical waveguide respectively, and these metallized films are bonded to each other by mutual diffusion of their atoms.

REFERENCES:
patent: 4479698 (1984-10-01), Landis et al.
patent: 4702547 (1987-10-01), Enochs
patent: 5146520 (1992-09-01), Yuuki et al.
patent: 5475784 (1995-12-01), Bookbinder et al.
patent: 5555333 (1996-09-01), Kato
Michael J. Wale et al., "Self-Aligned Flip-Chip Assembly of Photonic Devices with Electrical and Optical Connections", IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol. 13, No. 4, Dec. 1990, pp. 780-786.

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