Optical module and method for manufacturing the same

Optical waveguides – With disengagable mechanical connector – Optical fiber to a nonfiber optical device connector

Reexamination Certificate

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C216S002000, C438S027000, C385S014000

Reexamination Certificate

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06986609

ABSTRACT:
An optical module, in which one or more grooves on which a plurality of optical fibers or optical parts are mounted, are formed to different depths and a stopper hole is manufactured so as to prevent a convex corner phenomenon so that an optical axis is precisely aligned, and a method of manufacturing the same are provided. The method of manufacturing an optical module includes the steps of first etching to form one or more grooves on a first surface of a wafer, and second etching to form one or more stopper holes so that a second surface of the wafer is etched to penetrate the wafer. The optical module having one or more grooves for mounting one or more optical parts on a substrate, includes stopper holes which are formed by penetrating the bottom surface of the substrate to center a region which corresponds to a predetermined region among the grooves.

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patent: 41 01 043 (1992-08-01), None
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Japanese Abstract No. 01094305, dated Apr. 13, 1989.
Philippe Helin, et al.; Self-Aligned Micromachining Process for Large-Scale, Free-Space Optical Cross-Connects; Journal of Lightwave Technology, vol. 18, ; No. 12; Dec. 2000; pp. 1785-1791.
Japanese Abstract No. 2001013443, dated Jan. 19, 2001.
Japanese Abstract No. 57158824, dated Sep. 30, 1982.

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