Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2007-01-23
2007-01-23
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
C257SE21573, C438S053000
Reexamination Certificate
active
11195695
ABSTRACT:
A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided. As a result, the structure of modulating light by changing the reflection direction of the incident light is simple, response is fast, the wavelength of the incident light to be used is not limited, operation is stable, reliability is high, the number of manufacturing steps is small and cost reduction can be achieved.
REFERENCES:
patent: 5661591 (1997-08-01), Lin et al.
patent: 5751469 (1998-05-01), Arney et al.
patent: 5793519 (1998-08-01), Furlani et al.
patent: 5999303 (1999-12-01), Drake
patent: 6147789 (2000-11-01), Gelbart
patent: 6268948 (2001-07-01), Gelbart
patent: 6272304 (2001-08-01), Saito et al.
patent: 6381022 (2002-04-01), Zavracky
patent: 6677695 (2004-01-01), Dhuler et al.
patent: 6991953 (2006-01-01), Bruner et al.
patent: 2003/0054588 (2003-03-01), Patel et al.
patent: 2004/0219698 (2004-11-01), Mochizuki
patent: 2005/0264866 (2005-12-01), Ohtaka et al.
patent: 6-138403 (1994-05-01), None
patent: 7-218845 (1995-08-01), None
patent: 10-510374 (1998-10-01), None
patent: 2941952 (1999-08-01), None
patent: 2000-2842 (2000-01-01), None
patent: 3016871 (2000-03-01), None
patent: WO 96/41217 (1996-12-01), None
patent: WO 96/41224 (1996-12-01), None
patent: WO 96/41226 (1996-12-01), None
K.E. Petersen, Applied Physics Letters, vol. 31, No. 8, pp. 521-523, “Micromechanical Light Modulator Array Fabricated on Silicon”, Oct. 15, 1977.
O. Solgaard, et al., Optics Letters, vol. 17, No. 9, pp. 688-690, “Deformable Grating Optical Modulator”, May 1, 1992.
Larry J. Hornbeck, SPIE Critical Reviews Series, vol. 1150, pp. 86-102, “Deformable-Mirror Spatial Light Modulators”, Aug. 1989.
U.S. Appl. No. 11/406,372, filed Apr. 19, 2006, Nanjyo et al.
Horike Masanori
Katoh Seiichi
Nanjyo Takeshi
Ohta Eiichi
Ohtaka Kouichi
Mulpuri Savitri
Ricoh & Company, Ltd.
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