Optical modulator and method of producing the same

Details Optical modulator and method of producing the same Optical modulator and method of producing the same

1994-12-14

1996-08-06

Hellner, Mark

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359246, G02F 103

Patent

active

055439578

ABSTRACT:
The invention realizes an optical modulator which prevents occurrence of an edge breakdown and is improved in extinction characteristic and voltage resisting property. The optical modulator comprises an oxide film formed as a growth inhibiting film on a compound semiconductor substrate of a first conduction type, a double heterostructure including a clad layer of the first conduction type, a light absorbing layer and a clad layer of a second conduction type successively formed in an opening of the oxide film, and an embedding structure for covering over the entire double heterostructure. The optical modulator is characterized in that the carrier concentration of the clad layer of the first conduction type exhibits a continuous variation from the semiconductor substrate to the light absorbing layer or the carrier concentration of the embedding structure portion exhibits a variation from a low concentration to a high concentration.

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patent: 5381023 (1995-01-01), Komatsu
Lecture No. C-152, Spring Meeting of the Electronic Information Communication Society of Japan, 1993.
T. Kato et al., "DFB-LD/Modulator Integrated Light Source By Bandgap Energy Controlled Selective MOVPE", Electronic Letters, Jan. 16, 1992, vol. 28, No. 2, pp. 153-154.
K. Komatsu et al., "Semiconductor External Modulators For 2.5 Gb/s Optical Transmission Using Selective Growth by MOVPE", Optoelectronics, Jun. 1994, vol. 9, No. 2, pp. 241-250.

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