Optical microscope and spectrum measuring method

Details Optical microscope and spectrum measuring method Optical microscope and spectrum measuring method

2009-11-24

2011-12-20

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

Reexamination Certificate

active

08081309

ABSTRACT:
An optical microscope applies laser light to a sample through the an objective lens, detects reflected light reflected by the sample through the objective lens, changes a focal position of the laser light in an optical axis direction, extracts a focal position for spectrum measurement based on a detection result of the reflected light when the focal position of the laser light is changed, adjusts the focal position to coincide with the extracted focal position, separates outgoing light exiting from the sample by application of the laser light with the adjusted focal position from the laser light, and measures a spectrum of the outgoing light separated from the laser light with a spectroscope.

REFERENCES:
patent: 6943332 (2005-09-01), Suzuki
patent: 7561265 (2009-07-01), Kobayashi et al.
patent: 2003/0132394 (2003-07-01), Wolleschensky et al.
patent: 2010/0166293 (2010-07-01), Sugita et al.
patent: 2002-14043 (2002-01-01), None
patent: 2003-344776 (2003-12-01), None
patent: 2007-179002 (2007-07-01), None
Charlene A. Drumm, et al., “Microscopic Raman Line-Imaging With Principal Component Analysis” Applied Spectroscopy, 1995, vol. 49, Issue 9, pp. 1331-1337.

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