Optical micropressure transducer

Details Optical micropressure transducer Optical micropressure transducer

1986-11-19

1990-05-22

Woodiel, Donald O.

Measuring and testing

Volume or rate of flow

Thermal type

25023119, 356358, G01D 534, G01L 708, G01L 900

Patent

active

049266969

ABSTRACT:
A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.

REFERENCES:
patent: 3040583 (1982-06-01), Post
patent: 4158310 (1979-06-01), Ho
patent: 4408123 (1983-10-01), Sichling et al.
patent: 4589286 (1986-05-01), Berthold, III
patent: 4678902 (1987-07-01), Perlin
patent: 4678909 (1987-07-01), Jackson et al.
patent: 4682500 (1987-07-01), Kazutaka
patent: 4711246 (1987-12-01), Alderson

Affiliated with

Also associated with

Rating

Optical micropressure transducer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical micropressure transducer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical micropressure transducer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2125289