Optical microelectromechantical structure

Details Optical microelectromechantical structure Optical microelectromechantical structure

2003-06-06

2009-02-10

Leung, Quyen P (Department: 2874)

Optical waveguides

Integrated optical circuit

C385S018000

Reexamination Certificate

active

07489837

ABSTRACT:
The invention relates to an optical microelectromechanical structure (MEMS) comprising—an (at least one) optically transmissive layer (UTL)—an (at least one) intermediate layer structure (IL)—a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).

REFERENCES:
patent: 6400009 (2002-06-01), Bishop et al.
patent: 6808955 (2004-10-01), Ma
patent: 7003192 (2006-02-01), Blair et al.
patent: 7008812 (2006-03-01), Carley
patent: 2003/0038327 (2003-02-01), Smith

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