Optical microelectromechanical device and fabrication method...

Details Optical microelectromechanical device and fabrication method... Optical microelectromechanical device and fabrication method...

2007-01-16

2007-01-16

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S298000, C359S224200, C438S029000, C438S072000, C353S099000, C427S162000

Reexamination Certificate

active

11135900

ABSTRACT:
An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.

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