Optical microelectromechanical device

Details Optical microelectromechanical device Optical microelectromechanical device

2008-07-22

2008-07-22

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100

Reexamination Certificate

active

11133101

ABSTRACT:
An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the conductive lines, reflective members and edge supporters. The reflective members and conductive lines are orthogonal, defining a plurality of pixel areas. Each reflective member is supported by edge supporters arranged around each pixel area and over the dielectric layer by a predetermined gap. The reflective members cover the connecting end of each edge supporter, providing protection from damage during fabrication.

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China Office Action mailed Jul. 28, 2006.

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