Optical microelectromechanical device

Details Optical microelectromechanical device Optical microelectromechanical device

2008-07-22

2008-07-22

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100

Reexamination Certificate

active

07403321

ABSTRACT:
An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the conductive lines, reflective members and edge supporters. The reflective members and conductive lines are orthogonal, defining a plurality of pixel areas. Each reflective member is supported by edge supporters arranged around each pixel area and over the dielectric layer by a predetermined gap. The reflective members cover the connecting end of each edge supporter, providing protection from damage during fabrication.

REFERENCES:
patent: 6055090 (2000-04-01), Miles
patent: 6215579 (2001-04-01), Bloom et al.
patent: 6574033 (2003-06-01), Chui et al.
patent: 6674562 (2004-01-01), Miles
patent: 2002/0015215 (2002-02-01), Miles
patent: 2002/0024711 (2002-02-01), Miles
patent: 2002/0075555 (2002-06-01), Miles
patent: 2002/0126364 (2002-09-01), Miles
patent: 2003/0043157 (2003-03-01), Miles
patent: 2003/0133284 (2003-07-01), Chipchase et al.
patent: 2004/0150869 (2004-08-01), Kasai
patent: 2004/0234095 (2004-11-01), Yun
patent: 2005/0046922 (2005-03-01), Lin et al.
patent: 1549039 (2004-11-01), None
patent: 504583 (1988-04-01), None
China Office Action mailed Jul. 28, 2006.

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