Optical microcantilever

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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C250S306000

Reexamination Certificate

active

07150185

ABSTRACT:
An optical microcantilever for a scanning near field microscope has an optical waveguide for propagating light. The optical waveguide has a longitudinal axis, a light input/output end, a free end opposite to the light input/output end, and a tip formed at the free end of the cantilever and having a microscopic aperture at an end thereof. A support section has a first portion supporting the optical waveguide, a second portion and a third portion. The second portion has an optical element guide channel formed in the support section for supporting an optical element acting on light entering the optical waveguide or on light exiting from the optical waveguide and for determining a position of the optical element. The third portion is disposed between the first portion and the second portion and has a surface disposed at an angle of inclination relative to the longitudinal axis of the optical waveguide. The light input/output end of the optical waveguide projects above the third portion for reducing a coupling loss between the optical element and the optical waveguide.

REFERENCES:
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patent: 5770856 (1998-06-01), Fillard et al.
patent: 6528780 (2003-03-01), Mitsuoka et al.
patent: 29713746 (1998-10-01), None
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patent: 797117 (1997-09-01), None
patent: 0884617 (1998-12-01), None
patent: 9505000 (1995-02-01), None
Niwa T et al: “Optical mircrocantilever consisting of channel waveguide for scanning near-field optical microscopy controlled by atomic force” Journal of Microscopy Blackwell Science for R. Microsc. Soc UK, vol. 194, May 1999, pp. 388-392, XP002308087 ISSN: 0022-2720.

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