Optical method of examining reliefs on a structure

Details Optical method of examining reliefs on a structure Optical method of examining reliefs on a structure

2007-01-02

2007-01-02

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S625000, C356S237500

Reexamination Certificate

active

10534534

ABSTRACT:
A method for studying a surface provided with relief features, wherein a measurement spectrum is taken and then compared with test spectra representative of arbitrary structures that are adjusted stepwise. A correlation over representative points of the spectra is selected while optimizing the determination by a hierarchized adjustment of the parameters.

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